
・Excellent damping performance
・Built-in damper quickly converges the shaking of the equipment
・Height can be adjusted by leveling valve
・Built-in lower limit stopper
・Compatible with clean rooms
・Support valve system option can be selected
| PSB-D145 | PSB-D170 | PSB-D230 | PSB-D300 | PSB-D360 | ||
|---|---|---|---|---|---|---|
| Vibration isolation method | Bellows air spring | |||||
| H. | Operating height (mm) | 127 | 127 | 127 | 127 | 127 |
| Minimum height (mm) | 117 | 117 | 117 | 117 | 117 | |
| W×D | External dimensions (mm) | 200×200 | 230×230 | 280×280 | 330×330 | 420×420 |
| A×B | Mounting dimensions (mm) | 180×180 | 210×210 | 250×250 | 300×300 | 390×390 |
| C. | Mounting hole diameter (mm) | Φ12 | Φ16 | |||
| T1 | Upper plate thickness (mm) | 16 | 16 | 16 | 16 | 16 |
| T2 | Bottom plate thickness (mm) | 9 | 9 | 9 | 9 | 9 |
| Product mass (kg) | 12 | 15 | 24 | 36 | 54 | |
| Pressure receiving area (cm2) | 196 | 260 | 470 | 750 | 1070 | |
| Loading weight per unit (kg) | 800 | 1050 | 1900 | 3000 | 4250 | |
| Supply pressure (MPa) | 0.5 | |||||
| Damping method | silicone oil | |||||
| Natural frequency | Vertical: Approx. 3Hz Horizontal: Approx. 3Hz | |||||
| Leveling method | Automatic leveling | |||||
・Semiconductor and FPD (LCD) inspection equipment
・Semiconductor and FPD (LCD) manufacturing equipment
・Semiconductor and FPD (LCD) precision measuring equipment, etc.
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