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Anti-vibration table/stage
Passive vibration isolation unit [Bellows type unit] PSB-D

Passive vibration isolation unit

Passive vibration isolation unit [Bellows type unit] PSB-D

Features
specification
Main use

Space-saving, low-cost, and excellent damping function

Catalog (Japanese)

Watch introduction video

Features of Precision Vibration Isolation Table

Features

・Support valve system for improved vibration control performance (optional)

・Height can be adjusted using the leveling valve

・The support valve system allows for large volume intake and exhaust, enabling quick return to horizontal position.

Specification

Dimensions

PSB-D Specifications

Part number		PSB-D145	PSB-D170	PSB-D230	PSB-D300	PSB-D360
Vibration isolation method		Bellows air spring
Natural frequency		Vertical: Approx. 3Hz Horizontal: Approx. 3Hz
Leveling method		Automatic leveling
Loaded mass (4 units) (kg)		～3,200	～4,200	～7,600	～12,000	～17,000
Supply pressure (MPa)		0.5
Damping method		silicone oil
H.	Operating height (mm)	127
	Minimum height (mm)	117
W×D	External dimensions (mm)	200×200	230×230	280×280	330×330	420×420
A×B	Mounting dimensions (mm)	180×180	210×210	250×250	300×300	390×390
C.	Mounting hole diameter (mm)	Φ12		Φ16
T1	Upper plate thickness (mm)	16
T2	Bottom plate thickness (mm)	9
Pressure receiving area (cm2)		196	260	470	750	1070
Product mass (kg)		12	15	24	36	54

Main use

・Electron microscope
・Precision measuring device
・Semiconductor manufacturing equipment/inspection equipment
・FPD manufacturing equipment/inspection equipment

CONTACT

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