Anti-vibration table/stage

We support nanotechnology with advanced vibration control/motion control technology. Used in liquid crystal/semiconductor manufacturing inspection processes and electron microscopes.

• Active vibration isolation unit
• Passive vibration isolation unit
• Desktop anti-vibration table
• stage
• others

Active vibration isolation unit

Demonstrates excellent vibration isolation at all frequencies.
Optimal design is possible for equipment that requires vibration control performance in addition to vibration isolation performance.

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  Active vibration isolation unit [linear motor control] Type-LH

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  Active vibration isolation unit [coil spring linear motor control] Type-LX

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  Active vibration isolation unit [Vibration control linear] Type-LHKP

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  Active vibration isolation unit [air pressure control] Type-A

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  Active vibration isolation unit [air pressure control] Type-B

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  Active vibration isolation unit [air pressure control] Type-BLI

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  Active vibration isolation unit [air pressure control] Type-C

Passive vibration isolation unit

An optimal vibration isolation system can be configured according to the mounting equipment from a wide range of lineups that increase the degree of freedom in design.

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  Passive vibration isolation unit [Bellows type unit] PSB-D

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  Passive vibration isolation unit [Diaphragm type unit, external damper type] PST-D

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  Passive vibration isolation unit [Diaphragm type unit] PST

Desktop anti-vibration table

Demonstrates high vibration isolation performance from low to high frequencies without the need for air.
Vibration isolation table that pursues high performance and ease of use.

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  Desktop type active vibration isolation table【MINI】

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  Stand

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  TSP General-purpose tabletop vibration isolation stand

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  TCP Cleanroom Tabletop Anti-Vibration Table

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  TSH Desktop Optical Vibration Isolation Table

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  TCH Cleanroom Desktop Optical Vibration Isolation Table

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  51 Air damper vibration isolation rubber type tabletop vibration isolation table

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  53　Tabletop vibration isolation table for balances

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  71S Table-type vibration isolation table

stage

We have realized a one-stop solution for precision stages and anti-vibration tables.
It is possible to customize and respond to customer needs that continue to be miniaturized.

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  Precision stage + anti-vibration table

Others

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  Component mount (for vibration isolation)

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  High wedge HWM

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  High Wedge HW