Anti-vibration table/stage

We support nanotechnology with advanced vibration control/motion control technology. Used in liquid crystal/semiconductor manufacturing inspection processes and electron microscopes.

• Vibration isolation unit active
• Vibration isolation unit passive
• Desktop anti-vibration table active
• Tabletop anti-vibration table Passive
• Other anti-vibration table Passive
• Precision stage + anti-vibration table

Vibration isolation unit active

Demonstrates excellent vibration isolation at all frequencies.
Optimal design is possible for equipment that requires vibration control performance in addition to vibration isolation performance.

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  Active vibration isolation unit [linear motor control] LH type

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  Active vibration isolation unit [Linear motor control] LHKP type Vibration suppression linear active vibration isolation table

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  Active vibration isolation unit [linear motor control] MB type active multiple base

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  Active vibration isolation unit [pneumatic control] A type

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  Active vibration isolation unit [pneumatic control] B type

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  Active vibration isolation unit [Pneumatic control] BLI type

Vibration isolation unit passive

An optimal vibration isolation system can be configured according to the mounting equipment from a wide range of lineups that increase the degree of freedom in design.

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  Passive vibration isolation unit PSB-D (Built-in damper)

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  Passive vibration isolation unit PST-D (with damper)

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  Passive vibration isolation unit PST

Desktop anti-vibration table active

Demonstrates high vibration isolation performance from low to high frequencies without the need for air.
Vibration isolation table that pursues high performance and ease of use.

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  Desktop type active vibration isolation table【MINI】

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  Stand

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  Soundproof box AS series

Tabletop anti-vibration table Passive

This tabletop passive series offers excellent cost performance and can be selected according to the application.

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  50 model General-purpose desktop anti-vibration table *Limited stock

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  50C model Desktop anti-vibration table for clean room

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  51 model Air damper anti-vibration rubber tabletop anti-vibration table

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  52S model Desktop type optical anti-vibration table

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  53 Model Tabletop anti-vibration table for balance

Other anti-vibration table Passive

It uses a gimbal piston structure that exhibits excellent vibration isolation performance.
We have prepared a rich lineup to improve the operability and workability of precision equipment.

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  71S model table type anti-vibration table

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  Component mount (for vibration isolation)

Precision stage + anti-vibration table

We have realized a one-stop solution for precision stages and anti-vibration tables.
It is possible to customize and respond to customer needs that continue to be miniaturized.

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  Precision stage + anti-vibration table