Product information

Tabletop anti-vibration table Passive

50C model Desktop anti-vibration table for clean room

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Air spring type tabletop anti-vibration table for clean room
Equipped with a SUS304 board and an automatic height adjustment valve for central exhaust specifications, this is a high-performance tabletop vibration isolation table that is perfect for clean rooms with dust prevention.
(Gimbal piston is not equipped)

Performance/Features

Stainless steel mounting board

The surface of the mounting board is made of SUS304, so there is no need to worry about dust entering the clean room. In addition, the special damping structure provides excellent vibration damping characteristics.

Use height 53mm

It has become thinner and easier to use.

Automatic height adjustment valve for centralized exhaust

Exhaust from the automatic height adjustment valve is gathered in one place and discharged through the attached urethane tube from the central exhaust port on the back, so the air in the clean room will not be polluted.

Uses a proven high-performance air spring

Adopts the same special small air spring as the 50 series, which has many achievements. The same excellent vibration isolation effect as the 50 series can be obtained along with the large air damping due to the orifice.

Specifications/Standards

Part number50C-0405A50C-0506A50C-0605A50C-0806A
Natural frequencyUp and down: about 2.5Hz
Leveling methodCentral exhaust automatic leveling
{ Operates with compressed air or nitrogen gas of 0.3 to 0.7 MPa (3 to 7 kgf/cm²) }
Dimensions: Width x Depth x Height (mm)400 x 500 x 53500 x 600 x 53600 x 500 x 53800 x 600 x 53
Loading board specificationsSurface SUS304
Maximum load weight (kg)120
Product mass (kg)22292944
AccessoriesRegulator with filter, soft nylon tube 6mm x 3mm,
Urethane tube 6mm x 3mm, fitting (R1/4)
OptionSmall compressor

Note 1) Please consult with us for equipment with a large unbalanced load or a high center of gravity.

Main use

・Semiconductor inspection microscope
・Microscope for liquid crystal inspection
・Precision equipment used in other clean rooms

CONTACT

Feel free to contact us for a quote or inquiry

Feel free to contact us for a quote or inquiry

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