The surface of the mounting board is made of SUS304, so there is no need to worry about dust entering the clean room. In addition, the special damping structure provides excellent vibration damping characteristics.
It has become thinner and easier to use.
Exhaust from the automatic height adjustment valve is gathered in one place and discharged through the attached urethane tube from the central exhaust port on the back, so the air in the clean room will not be polluted.
Adopts the same special small air spring as the 50 series, which has many achievements. The same excellent vibration isolation effect as the 50 series can be obtained along with the large air damping due to the orifice.
Part number | 50C-0405A | 50C-0506A | 50C-0605A | 50C-0806A |
---|---|---|---|---|
Natural frequency | Up and down: about 2.5Hz | |||
Leveling method | Central exhaust automatic leveling { Operates with compressed air or nitrogen gas of 0.3 to 0.7 MPa (3 to 7 kgf/cm²) } | |||
Dimensions: Width x Depth x Height (mm) | 400 x 500 x 53 | 500 x 600 x 53 | 600 x 500 x 53 | 800 x 600 x 53 |
Loading board specifications | Surface SUS304 | |||
Maximum load weight (kg) | 120 | |||
Product mass (kg) | 22 | 29 | 29 | 44 |
Accessories | Regulator with filter, soft nylon tube 6mm x 3mm, Urethane tube 6mm x 3mm, fitting (R1/4) | |||
Option | Small compressor |
Note 1) Please consult with us for equipment with a large unbalanced load or a high center of gravity.
・Semiconductor inspection microscope
・Microscope for liquid crystal inspection
・Precision equipment used in other clean rooms
All rights reserved, © Copyright Kurashiki Kako Co., Ltd.
Feel free to contact us for a quote or inquiry