Product information

Passive vibration isolation unit

Passive vibration isolation unit [Diaphragm type unit] PST

この製品に対するお問い合わせはこちら

Compact gimbal piston mechanism that achieves advanced vibration isolation performance
The proven (dome) gimbal piston mechanism is used for the vibration isolation function, demonstrating excellent vibration isolation performance in the horizontal direction. In addition, since the structure ensures a large tank capacity, it also has excellent vertical vibration isolation performance. In addition, the variable orifice function enables optimal tuning of the balance between vibration isolation and damping performance.

Watch introduction video

Features

・All sizes have a uniform operating height of 185mm
・Variable orifice allows tuning of vibration isolation and damping performance
・Clean room compatible

Specification

Dimensions

PST Specification Table

ModelPST-304PST-305PST-306PST-308
Vibration isolation methodCymbal piston type air spring
Natural frequencyVertical direction2.0-2.5Hz1.5-2.0Hz
Horizontal direction1.5-1.8Hz1.5-1.8Hz
Leveling methodAutomatic leveling
Loaded mass (4 units) (kg)~ 400~ 700~ 1250~ 3000
Supply pressure (MPa)0.4 to 0.6
External dimensions (mm)A.170×170170×170200×200250×250
Mounting dimensions ( mm )B.150×150150×150180×180230×230
Working height ( mm )C.185185185185
Minimum height ( mm )D.180180180180
Mounting hole diameter ( mm )E.10101013
Upper plate thickness ( mm )T.10101010
Bottom plate thickness ( mm )F.6666
Product mass ( kg )771217

Main use

・Electron microscope
・Precision measuring device
・Semiconductor manufacturing equipment/inspection equipment
・FPD manufacturing equipment/inspection equipment

CONTACT

Feel free to contact us for a quote or inquiry

All rights reserved, © Copyright Kurashiki Kako Co., Ltd.

Feel free to contact us for a quote or inquiry

Return to top of page