In order to maximize the performance of precision stages, it is essential to have a vibration isolation table equipped with a vibration isolation function that reduces floor vibration and a vibration suppression function that improves tact time.
Kurashiki Kako has made it possible to provide a one-stop service by consistently designing and manufacturing everything from precision stages to anti-vibration tables. We will continue to sell new products ahead of the future in response to the ever-advancing equipment performance and customer demands.

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precision stage

Collaboration with Motion Trust Co., Ltd., which boasts a wide range of manufacturing achievements, from small stages for semiconductors to large stages for LCDs. We completed construction of a new factory and set up a new production system. We will propose the most suitable precision stage + anti-vibration table according to your request.

Anti-vibration table

As a manufacturer specializing in vibration control, we respond to customer needs with a wide range of variations.

HI-WEDGE

Installed at the bottom of the base frame, it exhibits a high-precision leveling function.
(0.24mm~/1 rotation, inclination up to ±3°)

For semiconductor production example

We provide optimal products for each process such as exposure, drawing, and inspection equipment in semiconductor manufacturing.
A combination of a stage that pursues ultra-precision drive with a low center of gravity and a low height, and a damping linear active anti-vibration table.

Production example for FPD

We provide optimal products for each process such as exposure, measurement, and inspection equipment in OLED and LCD manufacturing.
A combination of a stage that pursues reproducibility of repeatability of indicated positions over a long stroke and a multi-leg support structure including a pneumatically controlled active mount.

Stage factory introduction (6th factory)

Full view of the factory

loading port

maintenance room

Front chamber

clean room