Precision stage + anti-vibration table

stage

Precision stage + anti-vibration table: In order to maximize the performance of precision stages, it is essential to have a vibration isolation table equipped with a vibration isolation function that reduces floor vibration and a vibration suppression function that improves tact time.
Kurashiki Kako has made it possible to provide a one-stop service by consistently designing and manufacturing everything from precision stages to anti-vibration tables. We will continue to sell new products ahead of the future in response to the ever-advancing equipment performance and customer demands.

Integrated proposal of vibration isolation table + high-precision stage: To maximize the performance of a high-precision stage, it is necessary to have a vibration isolation function that reduces floor vibrations, and
A vibration isolation table with vibration suppression functions is essential to improve takt time.
Kurashiki Kako works with Motion Trust Co., Ltd. to provide a wide range of products, from high-precision stages to vibration isolation tables.
By carrying out design and manufacturing in an integrated manner, we have made it possible to provide a one-stop service.

Motion Trust Co., Ltd., a member of the Kurashiki Kako Group, has been manufacturing high-precision stages for over 20 years.
As a specialized manufacturer, we offer custom stages for various manufacturing equipment, including FPD and semiconductor equipment.
We are currently producing it.
If you have any inquiries regarding high precision stages, please contact Kurashiki Kako Group.

Motion Trust Co., Ltd.

Features

Stage component selection know-how

Ceramics (alumina, cordierite, etc.)
Stone (granite, mineral cast)
Casting materials
We will propose the optimal combination from a wide variety of materials to achieve the required precision.

Motion Control Technology

Motion controllers, motor drivers, linear motors from domestic and overseas manufacturers,
High accuracy is achieved by optimally combining a linear scale and a laser interferometer.

Assembly and adjustment technology

Combination of axis guide mechanisms (rolling guide, air slider stage), Z/θ/tilt mechanisms, etc.
We have extensive assembly know-how for stages with a variety of configurations.

For semiconductor production example

We provide optimal products for each process such as exposure, drawing, and inspection equipment in semiconductor manufacturing.
A combination of a stage that pursues ultra-precision drive with a low center of gravity and a low height, and a damping linear active anti-vibration table.

For semiconductor production example

Production example for FPD

We provide optimal products for each process such as exposure, measurement, and inspection equipment in OLED and LCD manufacturing.
A combination of a stage that pursues reproducibility of repeatability of indicated positions over a long stroke and a multi-leg support structure including a pneumatically controlled active mount.

Production example for FPD