Active vibration isolation unit
| Product number | EST-A6 | EST-A8 | EST-A11 | |
| Actuator | Air spring | |||
| Control method | FB/FF 6-degree-of-freedom control MFF (optional) | |||
| Leveling method | Automatic leveling | |||
| Controller *1 | Digital controller | |||
| Loaded mass (kg) | 230 | 550 | 1120 | |
| W×D | Vibration isolation unit external dimensions (mm) | 230×230 | 270×270 | 320×320 |
| A×B | Anti-vibration unit mounting dimensions (mm) | 210×210 | 250×250 | 300×300 |
| H. | Seated height (mm) | 178 | ||
| Operating height (mm) | 180 | |||
| T1 | Upper plate thickness (mm) | 20 | ||
| T2 | Lower plate thickness (mm) | 15 | ||
| Product mass (kg) | 18 | 22 | 35 | |
*1: The controller and power supply unit are installed separately.
*2: Maximum load mass when air supply pressure is 0.6 MPa. Per vibration isolation unit.
・Semiconductor manufacturing equipment/inspection equipment
・FPD manufacturing equipment/inspection equipment
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