Active vibration isolation unit [Air pressure control] Type-B

Active vibration isolation unit

Features
specification
Main use

Supports high loads and provides high damping performance: Active control provides excellent damping performance.
A small footprint has been achieved by devising the mounting mechanism.

Catalog (Japanese)

Watch introduction video

Features of Precision Vibration Isolation Table

Features

・High load type with emphasis on vibration damping

- Multi-stage mount structure

Specification

Dimensions

Type-B Specifications

Product number		EST-B11W	EST-B14	BST-B14W
Actuator		Air spring
Control method		FB/FF 6-degree-of-freedom control MFF (optional)
Leveling method		Automatic leveling
Controller *1		Digital controller
Loaded mass (kg)		1400	2000	3950
W×D	Vibration isolation unit external dimensions (mm)	260×260	360×360	360×360
A×B	Anti-vibration unit mounting dimensions (mm)	215×215	320×320	320×320
H.	Seated height (mm)	259	257	327
H.	Operating height (mm)	261	260	330
T1	Upper plate thickness (mm)	30	15	40
T2	Lower plate thickness (mm)	30	39	39
Product mass (kg)		40	70	90

*1: The controller and power supply unit are installed separately.
*2: Maximum load mass when air supply pressure is 0.6 MPa. Per vibration isolation unit.

Main use

・Semiconductor manufacturing equipment/inspection equipment
・FPD manufacturing equipment/inspection equipment

Product information

Active vibration isolation unit [air pressure control] Type-B

Watch introduction video

Features

・High load type with emphasis on vibration damping

- Multi-stage mount structure

Specification

Dimensions

Type-B Specifications

Main use

CONTACT

Product information

Active vibration isolation unit [air pressure control] Type-B

catalog

Watch introduction video

Features

・High load type with emphasis on vibration damping

- Multi-stage mount structure

Specification

Dimensions

Type-B Specifications

Main use

CONTACT