Active vibration isolation unit [Air pressure control] Type-BLI

Active vibration isolation unit

Features
specification
Main use

Responds to needs for higher loads and contributes to shortening the takt time of mounted equipment: It can also handle high-load equipment.
The active control system provides excellent damping performance.

Catalog (Japanese)

Features

- High load vibration damping type

- Thin design contributes to lowering the floor space of equipment

Specification

Dimensions

Type-BLI Specifications

Product number		EST-B14WLI	EST-B14W2LI
Actuator		Air spring
Control method		FB/FF 6-degree-of-freedom control MFF (optional)
Leveling method		Automatic leveling
Controller *1		Digital controller
Loaded mass (kg)		3000	6000
W×D	Vibration isolation unit external dimensions (mm)	430×600	630×730
A×B	Anti-vibration unit mounting dimensions (mm)	400×285	600×350
H.	Seated height (mm)	187	187
	Operating height (mm)	190	190
T1	Upper plate thickness (mm)	15	15
T2	Lower plate thickness (mm)	15	15
Product mass (kg)		90	155

*1: The controller and power supply unit are installed separately.
*2: Maximum load mass when air supply pressure is 0.6 MPa. Per vibration isolation unit.

Main use

・Semiconductor manufacturing equipment/inspection equipment
・FPD manufacturing equipment/inspection equipment

Product information

Active vibration isolation unit [air pressure control] Type-BLI

Features

- High load vibration damping type

- Thin design contributes to lowering the floor space of equipment

Specification

Dimensions

Type-BLI Specifications

Main use

CONTACT

Product information

Active vibration isolation unit [air pressure control] Type-BLI

catalog

Features

- High load vibration damping type

- Thin design contributes to lowering the floor space of equipment

Specification

Dimensions

Type-BLI Specifications

Main use

CONTACT