Active vibration isolation unit [Linear motor control] LH type

Vibration isolation unit active

Excellent vibration isolation and damping performance with a unique control method: The linear motor type reduces air consumption and has excellent vibration isolation performance.
Controllable up to high frequency range. Built-in gimbal piston provides excellent vibration isolation performance.

・Hybrid structure of dome gimbal piston and coil spring.

・Small footprint.

・Suitable for equipment with a high center of gravity.

	EST-L5HR-L	EST-L5HR-M	EST-L5HR-H	EST-L6HF-L	EST-L6HF-M	EST-L6HF-H
Actuator	Linear motor
Control method	FB/FF 6 degrees of freedom control
Leveling method	Automatic leveling
Controller *1	Digital controller
Loading mass (kg) *2	190～320	240～350	290～400	340～570	500～660	630～750
Isolator external dimensions (mm)	220×220			240×240
Isolator mounting dimensions (mm)	200×200			220×220
Operating height (mm)	176			185
Isolator mass (kg)	20			29

*1: The controller and power supply unit are installed separately.
*2: Maximum loading mass when air supply pressure is 0.6MPa. per isolator.

・Transmission electron microscope
・Scanning electron microscope, etc.

Product information