Product information

Active vibration isolation unit

Active vibration isolation unit [linear motor control] Type-LH

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Excellent vibration isolation and damping performance with a unique control method
The linear motor type reduces air consumption and has excellent vibration isolation performance.
Controllable up to high frequency range. Built-in gimbal piston provides excellent vibration isolation performance.

Watch introduction video

Features

- Hybrid structure of dome gimbal piston and coil spring
- Achieves a small footprint
・Ideal for equipment with a high center of gravity

Specification

Dimensions

Type-LH Specifications

Product numberEST-L5HR-LEST-L5HR-MEST-L5HR-HEST-L6HF-LEST-L6HF-MEST-L6HF-H
ActuatorLinear motor
Control methodFB/FF 6 degrees of freedom control
Leveling methodAutomatic leveling
Controller *1Digital controller
Loaded mass (kg)190～320240～350290～400340～570500～660630～750
W×DVibration isolation unit external dimensions (mm)220×220240×240
A×BAnti-vibration unit mounting dimensions (mm)200×200220×220
H.Seated height (mm)173182
Operating height (mm)176185
T1Upper plate thickness (mm)1515
T2Lower plate thickness (mm)106
Product mass (kg)2029

*1: The controller and power supply unit are installed separately.
*2: Maximum load mass when air supply pressure is 0.6 MPa. Per vibration isolation unit.

Main use

・Transmission electron microscope
・Scanning electron microscope, etc.

CONTACT

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