Active vibration isolation unit [Vibration control linear] Type-LHKP

Active vibration isolation unit

Supporting productivity improvement of semiconductor manufacturing equipment and inspection equipment: Active anti-vibration table with two popular types: linear motor control type and pneumatic control type.
The damping linear active vibration isolation table pursues the best of both worlds.

Product number		EST-L6HKP-200L	EST-L6HKP-200M	EST-L6HKP-200H	EST-L8HKP-200
Actuator		Linear motor
Control method		FB/FF 6 degrees of freedom control, MFF (motion feed forward)
Leveling method		Automatic leveling
Controller *1		Digital controller
Loaded mass (kg)		340 to 570	460 to 670	570 to 750	640 to 1250
W×D	Vibration isolation unit external dimensions (mm)	315 × 315			350×350
A×B	Anti-vibration unit mounting dimensions (mm)	295 × 295			325 × 325
H.	Seated height (mm)	217
	Operating height (mm)	220
T1	Upper plate thickness (mm)	15			16
T2	Lower plate thickness (mm)	9			9
Product mass (kg)		70			90

*1: The controller box is separate.
*2: Maximum load mass when air supply pressure is 0.6 MPa. Per vibration isolation unit.

・Semiconductor manufacturing equipment/inspection equipment
・FPD manufacturing equipment/inspection equipment

Product information