Active vibration isolation unit [Linear motor control] LHKP type Vibration suppression linear active vibration isolation table

Vibration isolation unit active

Supporting productivity improvement of semiconductor manufacturing equipment and inspection equipment: Active anti-vibration table with two popular types: linear motor control type and pneumatic control type.
The damping linear active vibration isolation table pursues the best of both worlds.

A small compressor can also be used.

The LH type, which has excellent vibration isolation performance, can also be used for vibration control applications.

Vibration control performance is improved by inputting stage movement information in advance.

	EST-L6HKP-200L	EST-L6HKP-200M	EST-L6HKP-200H	EST-L8HKP-200
Actuator	Linear motor
Control method	FB/FF 6 degrees of freedom control, MFF (motion feed forward)
Leveling method	Automatic leveling
Controller*1	Digital controller
Loading mass (kg)*2	340 to 570	460 to 670	570 to 750	640 to 1250
Isolator external dimensions (mm)	315 × 315			350×350
Operating height (mm)	220
Isolator mass (kg)	70			90

*1: The controller box is installed separately.
*2: Maximum loading mass when air supply pressure is 0.6MPa. per isolator.

・Semiconductor manufacturing equipment
・Semiconductor inspection equipment

Product information