Vibration isolation unit passive
An optimally designed damper reduces vibration during stage movement.
When isolating a device such as a stage that requires a large amount of movement of the center of gravity, quick control of supplying and exhausting a large amount of air is essential to quickly return the tilt of the stage to the horizontal position. It is the support valve system that made it possible.
A large amount of air is supplied and exhausted, and the tilt of the stage is quickly returned to the horizontal position.
| PST-311D | PST-314D | |||
|---|---|---|---|---|
| Vibration isolation unit | Damper unit | Vibration isolation unit | Damper unit | |
| Vibration isolation method | Gimbal piston air spring | － | Gimbal piston air spring | － |
| Natural frequency | Vertical: 1.8-2.5Hz Horizontal: 1.5-2.0Hz | |||
| Leveling method | Automatic leveling | |||
| Loading weight (with 4 legs) (kg) | ～6000 | － | ～12000 | － |
| Supply pressure (MPa) | 0.4 to 0.7 | － | 0.4 to 0.7 | － |
| External dimensions (A) (mm) | 330×330 | 150×150 | 400×400 | 150×150 |
| External dimensions (B) (mm) | 240×240 | 150×150 | 330×330 | 150×150 |
| Mounting dimension (C) (mm) | 300×300 | 125×125 | 370×370 | 125×125 |
| Mounting dimension (D) (mm) | 210×210 | 125×125 | 300×300 | 125×125 |
| Working height (E) (mm) | 230 | 230 | 230 | 230 |
| Minimum height (F) (mm) | 225 | 220 | 225 | 220 |
| Mounting hole diameter (G) (mm) | 16 | 15 | 16 | 15 |
| Thickness (H) (mm) | 9 | 9 | 9 | 9 |
| Thickness (I) (mm) | 4.5 | 9 | 4.5 | 9 |
| Product weight per unit (kg) | 26 | 9 | 42 | 9 |
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