Product information

Passive vibration isolation unit

Passive vibration isolation unit [Diaphragm type unit, external damper type] PST-D

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A damper and support valve are used as standard to achieve excellent damping performance during stage movement.
It has a built-in gimbal piston, so it exhibits high vibration isolation performance.

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Features

- Damper and support valves are standard equipment, achieving excellent vibration control performance.
・Optimally designed dampers reduce vibrations during stage transitions
・The support valve allows for large volume intake and exhaust, enabling quick return to horizontal position.

Specification

Dimensions

PST-D Specifications

PST-311DPST-314D
Vibration isolation unitDamper unitVibration isolation unitDamper unit
Vibration isolation methodGimbal piston air spring－Gimbal piston air spring－
Natural frequencyVertical: 1.8-2.5Hz Horizontal: 1.5-2.0Hz
Leveling methodAutomatic leveling
Loading weight (with 4 legs) (kg)～6,000－～12,000－
Supply pressure (MPa)0.4 to 0.7－0.4 to 0.7－
External dimensions (A) (mm)330×330150×150400×400150×150
External dimensions (B) (mm)240×240150×150330×330150×150
Mounting dimension (C) (mm)300×300125×125370×370125×125
Mounting dimension (D) (mm)210×210125×125300×300125×125
Working height (E) (mm)230230230230
Minimum height (F) (mm)225220225220
Mounting hole diameter (G) (mm)16151615
Thickness (H) (mm)9999
Thickness (I) (mm)4.594.59
Product mass (1 unit) (kg)269429

Main use

・Electron microscope
・Precision measuring device
・Semiconductor manufacturing equipment/inspection equipment
・Semiconductor manufacturing equipment/inspection equipment

CONTACT

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