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• Vibration isolation unit
• Desktop anti-vibration table
• Table type anti-vibration table

Vibration isolation unit

Active

	physics and chemistry						semiconductor	FPDs	precision machine
	optical microscope	electronic microscope	probe microscope	laser microscope	Precision measuring machine	others physics and chemistry equipment	semiconductor Manufacturing inspection	FPD manufacturing inspection	Ultra-precision processing machine
LH [Linear motor control] LH type	〇	◎	〇	〇	〇	〇
LHKP [Linear motor control] Linear active anti-vibration tableLHKP type		◎					◎		◎
[Pneumatic control] A tyoe	〇	〇	〇	〇	〇	〇	◎	◎	◎
B [Air pressure control] B tyoe					〇			◎	◎
BLI [Air pressure control] BLI tyoe					〇			◎	◎

passive

	physics and chemistry						semiconductor	FPDs	precision machine
	optical microscope	electronic microscope	probe microscope	laser microscope	Precision measuring machine	others physics and chemistry equipment	semiconductor Manufacturing inspection	FPD manufacturing inspection	Ultra-precision processing machine
PSB-D (Built-in damper)					◎			◎	◎
PST-D (with damper)	〇	〇	〇	〇	◎	〇	〇	◎	◎
PST (no damper)	〇	〇	〇	〇	◎	〇	〇	◎	◎

Desktop anti-vibration table

Active

	physics and chemistry						semiconductor	FPDs	precision machine
	optical microscope	electronic microscope	probe microscope	laser microscope	Precision measuring machine	others physics and chemistry equipment	semiconductor Manufacturing inspection	FPD manufacturing inspection	Ultra-precision processing machine
Desktop type active vibration isolation table【MINI】	〇	〇	◎	◎	◎	〇	〇
Dedicated stand for tabletop type active vibration isolation table【MINI】(option)	〇	〇	◎	◎	◎	〇	〇
Soundproof box (optional)			◎	◎	◎

passive

	physics and chemistry						semiconductor	FPDs	precision machine
	optical microscope	electronic microscope	probe microscope	laser microscope	Precision measuring machine	others physics and chemistry equipment	semiconductor Manufacturing inspection	FPD manufacturing inspection	Ultra-precision processing machine
TSP Model General-purpose tabletop vibration isolation stand	◎	〇	◎	〇	◎	〇	〇
TCP model Cleanroom tabletop vibration isolation table	◎	〇	◎	〇	◎	〇	〇
51 model Air damper anti-vibration rubber type desktop anti-vibration isolation	◎		◎		〇	〇
TSH model Tabletop optical vibration isolation table	◎	〇	◎	〇	〇	〇
53 Model Tabletop anti-vibration table for balance	◎		◎		〇	〇
TCH model Cleanroom tabletop optical vibration isolation table	◎	〇	◎	〇	〇	〇

Table type anti-vibration table

	physics and chemistry						semiconductor	FPDs	precision machine
	optical microscope	electronic microscope	probe microscope	laser microscope	Precision measuring machine	others physics and chemistry equipment	semiconductor Manufacturing inspection	FPD manufacturing inspection	Ultra-precision processing machine
71S model table type anti-vibration table	◎	〇	◎	〇	◎	〇			◎